This is a description for a learning module from Maricopa Advanced Technology Education Center. This PDF describes the module; access may be purchased by visiting the MATEC website. This module covers the circuits and equipment used in RF generators and systems. Power measurement circuits are built into most generators to monitor forward and reflected power. The phase-magnitude measuring circuit is widely used in RF systems to indicate an out-of-match condition. Feedback and drive circuits for variable capacitors are employed in impedance matching networks. The module will provide interactive lectures on circuits, theory of operation, and systems designed for semiconductor and other high-tech applications. Practice activities will enable students to identify key components and functions.